Multi-Focal Laser Direct Writing through Spatial Light Modulation Guided by Scalable Vector Graphics

PLUTO / PLUTO-2 Spatial Light Modulators
Bessel-/ Airy Beam Generation Materials Processing / Optical Fabrication
Published on:
Authors: Duan, Linhan; Zhu, Yueqiang; Bai, Haoxin; Zhang, Chen; Wang, Kaige; Bai, Jintao & Zhao, Wei
Abstract:
“Multi-focal laser direct writing (LDW) based on phase-only spatial light modulation (SLM) can realize flexible and parallel nanofabrication with high-throughput potential. In this investigation, a novel approach of combining two-photon absorption, SLM, and vector path-guided by scalable vector graphics (SVGs), termed SVG-guided SLM LDW, was developed and preliminarily tested for fast, flexible, and parallel nanofabrication. Three laser focuses were independently controlled with different paths, which were optimized according to the SVG to improve fabrication and promote time efficiency. The minimum structure width could be as low as 81 nm. Accompanied by a translation stage, a carp structure of 18.10 μm × 24.56 μm was fabricated. This method shows the possibility of developing LDW techniques toward fully electrical systems, and provides a potential way to efficiently engrave complex structures on nanoscales.”

Open Access

Publication: Micromachines
Issue/Year: Micromachines, Volume 14; Number 4; Pages 824; 2023
DOI: 10.3390/mi14040824
Link: https://doi.org/10.3390/mi14040824

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