Abstract: “Multi-focal laser direct writing (LDW) based on phase-only spatial light modulation (SLM) can realize flexible and parallel nanofabrication with high-throughput potential. In this investigation, a novel approach of combining two-photon absorption, SLM, and vector path-guided by scalable vector graphics (SVGs), termed SVG-guided SLM LDW, was developed and preliminarily tested for fast, flexible, and parallel nanofabrication. Three laser focuses were independently controlled with different paths, which were optimized according to the SVG to improve fabrication and promote time efficiency. The minimum structure width could be as low as 81 nm. Accompanied by a translation stage, a carp structure of 18.10 μm × 24.56 μm was fabricated. This method shows the possibility of developing LDW techniques toward fully electrical systems, and provides a potential way to efficiently engrave complex structures on nanoscales.”
Open Access
Publication: Micromachines
Issue/Year: Micromachines, Volume 14; Number 4; Pages 824; 2023
Authors:Sanjeev Kumar, Shane M. Eaton, Monica Bollani, Belén Sotillo, Andrea Chiappini, Maurizio Ferrari, Roberta Ramponi, Paolo Di Trapani, Ottavia Jedrkiewicz
Laser surface structuring of diamond with ultrashort Bessel beams
Authors:Liang Yang and Shengyun Ji and Kenan Xie and Wenqiang Du and Bingjie Liu and Yanlei Hu and Jiawen Li and Gang Zhao and Dong Wu and Wenhao Huang and Suling Liu and Hongyuan Jiang and Jiaru Chu
High efficiency fabrication of complex microtube arrays by scanning focused femtosecond laser Bessel beam for trapping/releasing biological cells
