Combination of an axicon and a spatial light modulator for the generation of multi-Bessel beams for microdrilling using ultrashort pulsed laser

Due to their special beam profile, Bessel beams offer advantageous properties for micro-drilling and internal volume processing, especially for transparent materials. In addition, the laser power of industrial ultrashort pulsed lasers has increased significantly in recent years, offering the possibility of highly efficient processes using multispot profiles. We report on optical simulations and an experimental optical setup for generating multiBessel beams by combining a refractive axicon and a spatial light modulator. This setup offers a new possibility of multiBessel beam generation by functional division of the Bessel beam generation by the axicon and the possibility of separation flexible beam splitting by a spatial light modulator. The beam profiles generated with this setup are analyzed and compared in this study using optical simulations and experiments. In addition to the analysis of the Bessel beams in the machining plane, they are also analyzed in the propagation direction by means of intensity distributions measured by a camera in small-step z positions. Furthermore, the experimental applicability of the module-based beam shaping system is demonstrated by integrating into an existing laser system.