Specklebasierte Charakterisierung anisotroper Oberflächen

PLUTO / PLUTO-2 Spatial Light Modulators
Imaging/ Image Processing
Published on:
Authors: León Schweickhardt , Dirk Stöbener und Andreas Fischer
Abstract:

Die specklebasierte Messung des Rau-heitsparameters𝑆qoder der Autokorrelationslänge𝑆alisotroper Oberflächen sind bekannte Verfahren und theo-retisch beschrieben. In diesem Artikel wird eine darüberhinausgehende multiparametrische, specklebasierte Cha-rakterisierung anisotroper Oberflächen vorgestellt. Dabeiwerden die Bearbeitungsrichtung, die dazu senkrechte la-terale Korrelationslänge und die bidirektionalen Rauheits-parameter aus einem einzigen Specklemuster bestimmt.

Open Access

Publication: tm – Technisches Messen
Issue/Year: tm – Technisches Messen, vol. 90, no. s1, 2023, pp. 61-66
DOI: 10.1515/teme-2023-0056
Link: https://doi.org/10.1515/teme-2023-0056

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