Fabrication of Large Area Photonic Crystals with Periodic Defects by One-Step Holographic Lithography

Standard DOE used
Published on:
Authors: Ma, Jie; Wong, Kam Sing; Li, Shan; Chen, Zhe; Zhou, Jianying & Zhong, Yongchun
Abstract:

“A one-step fabrication of a photonic crystal (PC) with functional defects is demonstrated. Using multi-beam phase-controlled holographic lithography with a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic defects were fabricated. The uniform area is up to 2mm<sup>2</sup>, and tens of defect channels have been introduced in the 1D and 2D PC structure. This technique gives rise to substantial reduction in the fabrication complexity and significant improvement in the spatial accuracy of introducing functional defects in photonic crystals. This method can also be used to design and fabricate three dimensional (3D) PCs with periodic defects.”

Open Access

Publication: Journal of the Optical Society of Korea
Issue/Year: J. Opt. Soc. Korea, Volume 19; Number 1; Pages 63–68; 2015
DOI: 10.3807/JOSK.2015.19.1.063
Link: https://doi.org/10.3807/JOSK.2015.19.1.063

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