Papers & References

Three-dimensional holographic lithography by an iterative algorithm

PLUTO / PLUTO-2 Spatial Light Modulators
Digital-/ Computer Holography/ CGH
Published on:
Authors: Joshua J. Cowling, Gavin L. Williams, Alan Purvis, Richard McWilliam, Jose J. Toriz-Garcia, Nicholas L. Seed, Florian B. Soulard, and Peter A. Ivey
Abstract:
“We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensional surfaces. The influence of simulated image plane separation on the final image, and its suitability for lithography, is assessed. Results are presented and the most suitable case is demonstrated experimentally.”

Restricted Access

Publication: Optics Letters
Issue/Year: Optics Letters, Vol. 36, Issue 13, pp. 2495-2497 (2011)
DOI: 10.1364/OL.36.002495
Link: https://doi.org/10.1364/OL.36.002495
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