High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator

Discontinued Devices LC-R 2500 Spatial Light Modulators
Digital-/ Computer Holography/ CGH Pulse Application / -Shaping
Published on:
Authors: Zheng Kuang, Walter Perrie, Jonathan Leach, Martin Sharp, Stuart P. Edwardson, Miles Padgett, Geoff Dearden and Ken G. Watkins
Abstract:
“High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be ~50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude.”

Restricted Access

Publication: Applied Surface Science
Issue/Year: Applied Surface Science, Volume 254 – 2008 (2008)
DOI: 10.1016/j.apsusc.2008.07.091
Link: https://doi.org/10.1016/j.apsusc.2008.07.091

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